JPS6228875U - - Google Patents
Info
- Publication number
- JPS6228875U JPS6228875U JP12002285U JP12002285U JPS6228875U JP S6228875 U JPS6228875 U JP S6228875U JP 12002285 U JP12002285 U JP 12002285U JP 12002285 U JP12002285 U JP 12002285U JP S6228875 U JPS6228875 U JP S6228875U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plates
- plasma cvd
- wafer holder
- pair
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12002285U JPS6228875U (en]) | 1985-08-05 | 1985-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12002285U JPS6228875U (en]) | 1985-08-05 | 1985-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228875U true JPS6228875U (en]) | 1987-02-21 |
Family
ID=31007948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12002285U Pending JPS6228875U (en]) | 1985-08-05 | 1985-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228875U (en]) |
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1985
- 1985-08-05 JP JP12002285U patent/JPS6228875U/ja active Pending